@article {95, title = {Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film}, journal = {Journal of Crystal Growth}, volume = {512}, year = {2019}, month = {Jan-04-2019}, pages = {16 - 19}, issn = {00220248}, doi = {10.1016/j.jcrysgro.2019.02.001}, author = {Tanaka, Shuichi and Shojiki, Kanako and Uesugi, Kenjiro and Hayashi, Yusuke and Miyake, Hideto} }