@article {96, title = {Polarity inversion of aluminum nitride by direct wafer bonding}, journal = {Applied Physics Express}, volume = {11}, year = {2018}, month = {Jan-03-2018}, pages = {031003}, issn = {1882-0778}, doi = {10.7567/APEX.11.031003}, author = {Hayashi, Yusuke and Katayama, Ryuji and Akiyama, Toru and Ito, Tomonori and Miyake, Hideto} }