@article {99,
	title = {Structural analysis of polarity inversion boundary in sputtered AlN films annealed under high temperatures},
	journal = {Japanese Journal of Applied Physics},
	volume = {58},
	year = {2019},
	month = {Jan-06-2019},
	pages = {SCCB30},
	issn = {0021-4922},
	doi = {10.7567/1347-4065/ab0d01},
	author = {Akiyma, Toru and Uchino, Motoshi and Nakamura, Kohji and Ito, Tomonori and Xiao, Shiyu and Miyake, Hideto}
}
