@article {93,
	title = {Effect of thermal annealing on AlN films grown on sputtered AlN templates by metalorganic vapor phase epitaxy},
	journal = {Japanese Journal of Applied Physics},
	volume = {57},
	year = {2018},
	month = {Jan-01-2018},
	pages = {01AD05},
	issn = {0021-4922},
	doi = {10.7567/JJAP.57.01AD05},
	author = {Yoshizawa, Ryo and Miyake, Hideto and Hiramatsu, Kazumasa}
}
