@article {96,
	title = {Polarity inversion of aluminum nitride by direct wafer bonding},
	journal = {Applied Physics Express},
	volume = {11},
	year = {2018},
	month = {Jan-03-2018},
	pages = {031003},
	issn = {1882-0778},
	doi = {10.7567/APEX.11.031003},
	author = {Hayashi, Yusuke and Katayama, Ryuji and Akiyama, Toru and Ito, Tomonori and Miyake, Hideto}
}
