We've updated publication list on our website, and reached a milestone! Feel curious to dive into more than 50 publications investigating Gallium Nitride power devices!
Improvement mechanism of sputtered AlN films by high-temperature annealing
| Title | Improvement mechanism of sputtered AlN films by high-temperature annealing |
| Publication Type | Journal Article |
| Year of Publication | 2018 |
| Authors | Xiao S, Suzuki R, Miyake H, Harada S, Ujihara T |
| Journal | Journal of Crystal Growth |
| Volume | 502 |
| Pagination | 41 - 44 |
| Date Published | Jan-11-2018 |
| ISSN | 00220248 |
| DOI | 10.1016/j.jcrysgro.2018.09.002 |
| Short Title | Journal of Crystal Growth |


