Oxygen Incorporation Kinetics in Vicinal <i>m</i> (10−10) Gallium Nitride Growth by Metal‐Organic Vapor Phase Epitaxy

TitleOxygen Incorporation Kinetics in Vicinal m (10−10) Gallium Nitride Growth by Metal‐Organic Vapor Phase Epitaxy
Publication TypeJournal Article
Year of Publication2020
AuthorsYosho D, Shintaku F, Inatomi Y, Kangawa Y, Iwata J-I, Oshiyama A, Shiraishi K, Tanaka A, Amano H
Journalphysica status solidi (RRL) – Rapid Research Letters
Volume14
Issue6
Pagination2000142
Date PublishedJan-06-2020
ISSN1862-6254
DOI10.1002/pssr.v14.610.1002/pssr.202000142
Short TitlePhys. Status Solidi RRL