CH4 Adsorption Probability on GaN(0001) and (000−1) during Metalorganic Vapor Phase Epitaxy and Its Relationship to Carbon Contamination in the Films

TitleCH4 Adsorption Probability on GaN(0001) and (000−1) during Metalorganic Vapor Phase Epitaxy and Its Relationship to Carbon Contamination in the Films
Publication TypeJournal Article
Year of Publication2019
AuthorsKusaba A, Li G, Kempisty P, von Spakovsky M, Kangawa Y
JournalMaterials
Volume12
Issue6
Pagination972
Date PublishedJan-03-2019
URLhttps://www.mdpi.com/1996-1944/12/6/972https://www.mdpi.com/1996-1944/12/6/972/pdf
DOI10.3390/ma12060972
Short TitleMaterials