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Local and anisotropic strain in AlN film on sapphire observed by Raman scattering spectroscopy
| Title | Local and anisotropic strain in AlN film on sapphire observed by Raman scattering spectroscopy |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Shojiki K, Hayashi Y, Uesugi K, Miyake H |
| Journal | Japanese Journal of Applied Physics |
| Volume | 58 |
| Issue | SC |
| Pagination | SCCB17 |
| Date Published | Jan-06-2019 |
| ISSN | 0021-4922 |
| DOI | 10.7567/1347-4065/ab0d07 |
| Short Title | Jpn. J. Appl. Phys. |
