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Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film
| Title | Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Tanaka S, Shojiki K, Uesugi K, Hayashi Y, Miyake H |
| Journal | Journal of Crystal Growth |
| Volume | 512 |
| Pagination | 16 - 19 |
| Date Published | Jan-04-2019 |
| ISSN | 00220248 |
| DOI | 10.1016/j.jcrysgro.2019.02.001 |
| Short Title | Journal of Crystal Growth |
