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Polarity inversion of aluminum nitride by direct wafer bonding
Title | Polarity inversion of aluminum nitride by direct wafer bonding |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Hayashi Y, Katayama R, Akiyama T, Ito T, Miyake H |
Journal | Applied Physics Express |
Volume | 11 |
Issue | 3 |
Pagination | 031003 |
Date Published | Jan-03-2018 |
ISSN | 1882-0778 |
DOI | 10.7567/APEX.11.031003 |
Short Title | Appl. Phys. Express |