Polarity inversion of aluminum nitride by direct wafer bonding

TitlePolarity inversion of aluminum nitride by direct wafer bonding
Publication TypeJournal Article
Year of Publication2018
AuthorsHayashi Y, Katayama R, Akiyama T, Ito T, Miyake H
JournalApplied Physics Express
Volume11
Issue3
Pagination031003
Date PublishedJan-03-2018
ISSN1882-0778
DOI10.7567/APEX.11.031003
Short TitleAppl. Phys. Express